https://wiki.unissula.ac.id/index.php?action=history&feed=atom&title=Spektrometri_massa_ion_sekunder 2026-09-16T22:01:15Z Riwayat revisi halaman ini di wiki MediaWiki 1.46.0 https://wiki.unissula.ac.id/index.php?title=Spektrometri_massa_ion_sekunder&diff=9970&oldid=prev 2026-08-25T09:05:21Z

<p>Presentation V4: sitasi, referensi, Math, Wikimedia Commons, dan atribusi</p> <table style="background-color: #fff; color: #202122;" data-mw-interface=""> <col class="diff-marker" /> <col class="diff-content" /> <col class="diff-marker" /> <col class="diff-content" /> <tr class="diff-title" lang="id"> <td colspan="2" style="background-color: #fff; color: #202122; text-align: center;">← Revisi sebelumnya</td> <td colspan="2" style="background-color: #fff; color: #202122; text-align: center;">Revisi per 25 Agustus 2026 09.05</td> </tr><tr><td colspan="2" class="diff-lineno" id="mw-diff-left-l1">Baris 1:</td> <td colspan="2" class="diff-lineno">Baris 1:</td></tr> <tr><td colspan="2" class="diff-side-deleted"></td><td class="diff-marker" data-marker="+"></td><td style="color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #a3d3ff; vertical-align: top; white-space: pre-wrap;"><div><ins style="font-weight: bold; text-decoration: none;">[[File:IMS3F_pbmf.JPG|thumb|right|280px|IMS3F pbmf]]</ins></div></td></tr> <tr><td colspan="2" class="diff-side-deleted"></td><td class="diff-marker" data-marker="+"></td><td style="color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #a3d3ff; vertical-align: top; white-space: pre-wrap;"><div><ins style="font-weight: bold; text-decoration: none;"></ins></div></td></tr> <tr><td class="diff-marker"></td><td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><div>&#039;&#039;&#039;Spektrometri massa ion sekunder&#039;&#039;&#039; (&#039;&#039;&#039;SIMS&#039;&#039;&#039;) adalah teknik yang digunakan untuk menganalisis komposisi permukaan padat dan [[Teknologi film tipis|lapisan tipis]] dengan [[pemercikan (fisika)|memercikkan]] permukaan suatu spesimen dengan [[berkas ion]] primer terfokus dan mengumpulkan serta menganalisis ion sekunder yang dikeluarkan. Rasio massa/muatan ion sekunder ini diukur dengan [[Spektrometri massa|spektrometer massa]] untuk menentukan komposisi unsur, isotop, atau molekul permukaan hingga kedalaman 1 hingga 2&amp;nbsp;nm. Karena adanya variasi yang besar dalam probabilitas ionisasi di antara unsur-unsur yang terpercik dari bahan yang berbeda, perbandingan terhadap standar yang dikalibrasi dengan baik diperlukan untuk mencapai hasil kuantitatif yang akurat. SIMS merupakan teknik analisis permukaan yang paling sensitif, dengan batas deteksi unsur mulai dari bagian per juta hingga bagian per miliar.</div></td><td class="diff-marker"></td><td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><div>&#039;&#039;&#039;Spektrometri massa ion sekunder&#039;&#039;&#039; (&#039;&#039;&#039;SIMS&#039;&#039;&#039;) adalah teknik yang digunakan untuk menganalisis komposisi permukaan padat dan [[Teknologi film tipis|lapisan tipis]] dengan [[pemercikan (fisika)|memercikkan]] permukaan suatu spesimen dengan [[berkas ion]] primer terfokus dan mengumpulkan serta menganalisis ion sekunder yang dikeluarkan. Rasio massa/muatan ion sekunder ini diukur dengan [[Spektrometri massa|spektrometer massa]] untuk menentukan komposisi unsur, isotop, atau molekul permukaan hingga kedalaman 1 hingga 2&amp;nbsp;nm. Karena adanya variasi yang besar dalam probabilitas ionisasi di antara unsur-unsur yang terpercik dari bahan yang berbeda, perbandingan terhadap standar yang dikalibrasi dengan baik diperlukan untuk mencapai hasil kuantitatif yang akurat. SIMS merupakan teknik analisis permukaan yang paling sensitif, dengan batas deteksi unsur mulai dari bagian per juta hingga bagian per miliar.</div></td></tr> <tr><td class="diff-marker"></td><td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><div>==Lihat pula==</div></td><td class="diff-marker"></td><td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><div>==Lihat pula==</div></td></tr> <tr><td class="diff-marker"></td><td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><div>* [[Spektrometri massa ion sekunder skala nano|NanoSIMS]]</div></td><td class="diff-marker"></td><td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><div>* [[Spektrometri massa ion sekunder skala nano|NanoSIMS]]</div></td></tr> <tr><td class="diff-marker" data-marker="−"></td><td style="color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #ffe49c; vertical-align: top; white-space: pre-wrap;"><div><del style="font-weight: bold; text-decoration: none;">==Referensi==</del></div></td><td colspan="2" class="diff-side-added"></td></tr> <tr><td class="diff-marker" data-marker="−"></td><td style="color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #ffe49c; vertical-align: top; white-space: pre-wrap;"><div><del style="font-weight: bold; text-decoration: none;"></del></div></td><td colspan="2" class="diff-side-added"></td></tr> <tr><td class="diff-marker"></td><td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><div>==Bibliografi umum==</div></td><td class="diff-marker"></td><td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><div>==Bibliografi umum==</div></td></tr> <tr><td class="diff-marker" data-marker="−"></td><td style="color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #ffe49c; vertical-align: top; white-space: pre-wrap;"><div> </div></td><td class="diff-marker" data-marker="+"></td><td style="color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #a3d3ff; vertical-align: top; white-space: pre-wrap;"><div>* Benninghoven, A., Rüdenauer, F. G., Werner, H. W., ''Secondary Ion Mass Spectrometry: Basic Concepts, Instrumental Aspects, Applications, and Trends'', Wiley, New York, 1987 (1227 pages),  </div></td></tr> <tr><td class="diff-marker" data-marker="−"></td><td style="color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #ffe49c; vertical-align: top; white-space: pre-wrap;"><div>* Benninghoven, A., Rüdenauer, F. G., Werner, H. W., ''Secondary Ion Mass Spectrometry: Basic Concepts, Instrumental Aspects, Applications, and Trends'', Wiley, New York, 1987 (1227 pages),</div></td><td class="diff-marker" data-marker="+"></td><td style="color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #a3d3ff; vertical-align: top; white-space: pre-wrap;"><div>* Vickerman, J. C., Brown, A., Reed, N. M., ''Secondary Ion Mass Spectrometry: Principles and Applications'', Clarendon Press, Oxford, 1989 (341 pages),  </div></td></tr> <tr><td class="diff-marker" data-marker="−"></td><td style="color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #ffe49c; vertical-align: top; white-space: pre-wrap;"><div>* Vickerman, J. C., Brown, A., Reed, N. M., ''Secondary Ion Mass Spectrometry: Principles and Applications'', Clarendon Press, Oxford, 1989 (341 pages),</div></td><td class="diff-marker" data-marker="+"></td><td style="color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #a3d3ff; vertical-align: top; white-space: pre-wrap;"><div>* Wilson, R. G., Stevie, F. A., Magee, C. W., ''Secondary Ion Mass Spectrometry: A Practical Handbook for Depth Profiling and Bulk Impurity Analysis'', John Wiley &amp; Sons, New York, 1989,  </div></td></tr> <tr><td class="diff-marker" data-marker="−"></td><td style="color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #ffe49c; vertical-align: top; white-space: pre-wrap;"><div>* Wilson, R. G., Stevie, F. A., Magee, C. W., ''Secondary Ion Mass Spectrometry: A Practical Handbook for Depth Profiling and Bulk Impurity Analysis'', John Wiley &amp; Sons, New York, 1989,</div></td><td class="diff-marker" data-marker="+"></td><td style="color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #a3d3ff; vertical-align: top; white-space: pre-wrap;"><div>* Vickerman, J. C., Briggs, D., ''ToF-SIMS: Surface Analysis by Mass Spectrometry', IM Publications, Chichester UK and SurfaceSpectra, Manchester, UK, 2001 (789 pages),  </div></td></tr> <tr><td class="diff-marker" data-marker="−"></td><td style="color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #ffe49c; vertical-align: top; white-space: pre-wrap;"><div>* Vickerman, J. C., Briggs, D., ''ToF-SIMS: Surface Analysis by Mass Spectrometry', IM Publications, Chichester UK and SurfaceSpectra, Manchester, UK, 2001 (789 pages),</div></td><td class="diff-marker" data-marker="+"></td><td style="color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #a3d3ff; vertical-align: top; white-space: pre-wrap;"><div>* Bubert, H., Jenett, H., 'Surface and Thin Film Analysis: A Compendium of Principles, Instrumentation, and Applications'', pp.&amp;nbsp;86–121, Wiley-VCH, Weinheim, Germany, 2002,  </div></td></tr> <tr><td class="diff-marker" data-marker="−"></td><td style="color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #ffe49c; vertical-align: top; white-space: pre-wrap;"><div>* Bubert, H., Jenett, H., 'Surface and Thin Film Analysis: A Compendium of Principles, Instrumentation, and Applications'', pp.&amp;nbsp;86–121, Wiley-VCH, Weinheim, Germany, 2002,</div></td><td colspan="2" class="diff-side-added"></td></tr> <tr><td class="diff-marker"></td><td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><br></td><td class="diff-marker"></td><td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><br></td></tr> <tr><td class="diff-marker"></td><td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><div>==Pranala luar==</div></td><td class="diff-marker"></td><td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><div>==Pranala luar==</div></td></tr> <tr><td class="diff-marker"></td><td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><div>*  Tutorial pages for SIMS [http://www.eag.com/mc/sims-theory.html theory] and [http://www.eaglabs.com/training/tutorials/sims_instrumentation_tutorial/ instrumentation]</div></td><td class="diff-marker"></td><td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><div>*  Tutorial pages for SIMS [http://www.eag.com/mc/sims-theory.html theory] and [http://www.eaglabs.com/training/tutorials/sims_instrumentation_tutorial/ instrumentation]</div></td></tr> <tr><td class="diff-marker"></td><td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><br></td><td class="diff-marker"></td><td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><br></td></tr> <tr><td colspan="2" class="diff-side-deleted"></td><td class="diff-marker" data-marker="+"></td><td style="color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #a3d3ff; vertical-align: top; white-space: pre-wrap;"><div><ins style="font-weight: bold; text-decoration: none;">== Sumber dan atribusi ==</ins></div></td></tr> <tr><td class="diff-marker"></td><td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><br></td><td class="diff-marker"></td><td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><br></td></tr> <tr><td colspan="2" class="diff-side-deleted"></td><td class="diff-marker" data-marker="+"></td><td style="color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #a3d3ff; vertical-align: top; white-space: pre-wrap;"><div><ins style="font-weight: bold; text-decoration: none;">Konten artikel ini diadaptasi dari [https://id.wikipedia.org/w/index.php?title=Spektrometri+massa+ion+sekunder&amp;oldid=28080084 Wikipedia bahasa Indonesia], revisi 28080084 (2025-10-17T19:13:40Z), yang tersedia berdasarkan lisensi Creative Commons Atribusi-BerbagiSerupa (CC BY-SA). Gambar pada artikel ini bersumber dari Wikimedia Commons dan mengikuti ketentuan lisensi masing-masing berkas. Mohon gunakan konten dan media secara bijak serta sesuai dengan ketentuan lisensi yang berlaku.</ins></div></td></tr> <tr><td class="diff-marker"></td><td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><br></td><td class="diff-marker"></td><td style="background-color: #f8f9fa; color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #eaecf0; vertical-align: top; white-space: pre-wrap;"><br></td></tr> <tr><td class="diff-marker" data-marker="−"></td><td style="color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #ffe49c; vertical-align: top; white-space: pre-wrap;"><div><del style="font-weight: bold; text-decoration: none;">== Sumber dan atribusi ==</del></div></td><td class="diff-marker" data-marker="+"></td><td style="color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #a3d3ff; vertical-align: top; white-space: pre-wrap;"><div><ins style="font-weight: bold; text-decoration: none;">&lt;!</ins>-- <ins style="font-weight: bold; text-decoration: none;">WIKI_UNISSULA_PRESENTATION_V4 </ins>--<ins style="font-weight: bold; text-decoration: none;">&gt;</ins></div></td></tr> <tr><td class="diff-marker" data-marker="−"></td><td style="color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #ffe49c; vertical-align: top; white-space: pre-wrap;"><div> </div></td><td colspan="2" class="diff-side-added"></td></tr> <tr><td class="diff-marker" data-marker="−"></td><td style="color: #202122; font-size: 88%; border-style: solid; border-width: 1px 1px 1px 4px; border-radius: 0.33em; border-color: #ffe49c; vertical-align: top; white-space: pre-wrap;"><div><del style="font-weight: bold; text-decoration: none;">Konten artikel ini diadaptasi dari [https://id.wikipedia.org/w/index.php?title=Spektrometri+massa+ion+sekunder&amp;oldid=28080084 Wikipedia bahasa Indonesia], revisi 28080084 (2025</del>-<del style="font-weight: bold; text-decoration: none;">10</del>-<del style="font-weight: bold; text-decoration: none;">17T19:13:40Z), yang tersedia berdasarkan lisensi Creative Commons Atribusi</del>-<del style="font-weight: bold; text-decoration: none;">BerbagiSerupa (CC BY</del>-<del style="font-weight: bold; text-decoration: none;">SA). Mohon gunakan konten ini secara bijak serta sesuai dengan ketentuan lisensi yang berlaku.</del></div></td><td colspan="2" class="diff-side-added"></td></tr> <!-- diff cache key wiki_unissula_recovered:diff:1.41:old-9570:rev-9970:php=table --> </table>

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<p>Impor teks terkontrol dari Wikipedia bahasa Indonesia; revisi 28080084; atribusi sumber disertakan.</p> <p><b>Halaman baru</b></p><div>&#039;&#039;&#039;Spektrometri massa ion sekunder&#039;&#039;&#039; (&#039;&#039;&#039;SIMS&#039;&#039;&#039;) adalah teknik yang digunakan untuk menganalisis komposisi permukaan padat dan [[Teknologi film tipis|lapisan tipis]] dengan [[pemercikan (fisika)|memercikkan]] permukaan suatu spesimen dengan [[berkas ion]] primer terfokus dan mengumpulkan serta menganalisis ion sekunder yang dikeluarkan. Rasio massa/muatan ion sekunder ini diukur dengan [[Spektrometri massa|spektrometer massa]] untuk menentukan komposisi unsur, isotop, atau molekul permukaan hingga kedalaman 1 hingga 2&amp;nbsp;nm. Karena adanya variasi yang besar dalam probabilitas ionisasi di antara unsur-unsur yang terpercik dari bahan yang berbeda, perbandingan terhadap standar yang dikalibrasi dengan baik diperlukan untuk mencapai hasil kuantitatif yang akurat. SIMS merupakan teknik analisis permukaan yang paling sensitif, dengan batas deteksi unsur mulai dari bagian per juta hingga bagian per miliar.<br /> ==Lihat pula==<br /> * [[Spektrometri massa ion sekunder skala nano|NanoSIMS]]<br /> ==Referensi==<br /> <br /> ==Bibliografi umum==<br /> <br /> * Benninghoven, A., Rüdenauer, F. G., Werner, H. W., &#039;&#039;Secondary Ion Mass Spectrometry: Basic Concepts, Instrumental Aspects, Applications, and Trends&#039;&#039;, Wiley, New York, 1987 (1227 pages),<br /> * Vickerman, J. C., Brown, A., Reed, N. M., &#039;&#039;Secondary Ion Mass Spectrometry: Principles and Applications&#039;&#039;, Clarendon Press, Oxford, 1989 (341 pages),<br /> * Wilson, R. G., Stevie, F. A., Magee, C. W., &#039;&#039;Secondary Ion Mass Spectrometry: A Practical Handbook for Depth Profiling and Bulk Impurity Analysis&#039;&#039;, John Wiley &amp; Sons, New York, 1989,<br /> * Vickerman, J. C., Briggs, D., &#039;&#039;ToF-SIMS: Surface Analysis by Mass Spectrometry&#039;, IM Publications, Chichester UK and SurfaceSpectra, Manchester, UK, 2001 (789 pages),<br /> * Bubert, H., Jenett, H., &#039;Surface and Thin Film Analysis: A Compendium of Principles, Instrumentation, and Applications&#039;&#039;, pp.&amp;nbsp;86–121, Wiley-VCH, Weinheim, Germany, 2002,<br /> <br /> ==Pranala luar==<br /> * Tutorial pages for SIMS [http://www.eag.com/mc/sims-theory.html theory] and [http://www.eaglabs.com/training/tutorials/sims_instrumentation_tutorial/ instrumentation]<br /> <br /> <br /> <br /> == Sumber dan atribusi ==<br /> <br /> Konten artikel ini diadaptasi dari [https://id.wikipedia.org/w/index.php?title=Spektrometri+massa+ion+sekunder&amp;oldid=28080084 Wikipedia bahasa Indonesia], revisi 28080084 (2025-10-17T19:13:40Z), yang tersedia berdasarkan lisensi Creative Commons Atribusi-BerbagiSerupa (CC BY-SA). Mohon gunakan konten ini secara bijak serta sesuai dengan ketentuan lisensi yang berlaku.</div>

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